Self-aligned contact process enabled by low temperature

ABSTRACT

Self-aligned contacts of a semiconductor device are fabricated by forming a metal gate structure on a portion of a semiconductor layer of a substrate. The metal gate structure contacts inner sidewalls of a gate spacer. A second sacrificial epitaxial layer is formed on a first sacrificial epitaxial layer. The first sacrificial epitaxial layer is adjacent to the gate spacer and is formed on source/drain regions of the semiconductor layer. The first and second sacrificial epitaxial layers are recessed. The recessing exposes at least a portion of the source/drain regions. A first dielectric layer is formed on the exposed portions of the source/drain regions, and over the gate spacer and metal gate structure. At least one cavity within the first dielectric layer is formed above at least one of the exposed portions of source/drain regions. At least one metal contact is formed within the at least one cavity.

The present disclosure generally relates to the field of semiconductors,and more particularly relates to self-aligned contacts for semiconductordevices.

BACKGROUND OF THE INVENTION

As transistor structures continue to be scaled down, the pitch scaling(i.e., the space between the gate and contact) becomes more and morechallenging. As the two contact nodes become closer to each other, theyield of the transistor is the first to be affected since the gate tocontact short results in extra leakage current or even devicemalfunction.

SUMMARY OF THE INVENTION

In one embodiment, a method for forming self-aligned contacts of asemiconductor device is disclosed. The method comprises forming a metalgate structure on a portion of a semiconductor layer of a substrate. Themetal gate structure contacts inner sidewalls of a gate spacer. A secondsacrificial epitaxial layer is formed on a first sacrificial epitaxiallayer. The first sacrificial epitaxial layer is adjacent to the gatespacer and is formed on source/drain regions of the semiconductor layer.The first and second sacrificial epitaxial layers are recessed. Therecessing exposes at least a portion of the source/drain regions. Afirst dielectric layer is formed on the exposed portions of thesource/drain regions, and over the gate spacer and metal gate structure.At least one cavity within the first dielectric layer is formed above atleast one of the exposed portions of source/drain regions. At least onemetal contact is formed within the at least one cavity.

In another embodiment, a method for forming self-aligned contacts of asemiconductor device is disclosed. The method comprises forming a metalgate structure on a portion of the semiconductor layer of a substrateand contacting inner sidewalls of a gate spacer. A second epitaxiallayer is formed on a first sacrificial epitaxial layer. The firstepitaxial layer is adjacent to the gate spacer and is formed onsource/drain regions of the semiconductor layer. A first dielectriclayer is formed on a top surface of the second epitaxial layer. At leasta portion of the first dielectric layer, the second epitaxial layer, andthe first epitaxial layer is recessed. This recessing forms at one leastcavity exposing at least a portion of at least one of the source/drainregions. At least one metal contact is formed within the at least onecavity.

In yet another embodiment, a semiconductor device is disclosed. Thesemiconductor device comprises a substrate and a semiconductor layerformed on the substrate. A metal gate structure is formed on a portionof the semiconductor layer. A gate spacer is formed on the metal gatestructure. A first epitaxial layer is formed on source/drain regions ofthe semiconductor layer and adjacent to the gate spacer. A secondepitaxial layer is formed on a top surface of the first epitaxial layer.At one self-aligned metal contact is formed on at least one of thesource/drain regions.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying figures where like reference numerals refer toidentical or functionally similar elements throughout the separateviews, and which together with the detailed description below areincorporated in and form part of the specification, serve to furtherillustrate various embodiments and to explain various principles andadvantages all in accordance with the present disclosure, in which:

FIG. 1 is an isometric view of a semiconductor substrate according toone embodiment of the present disclosure;

FIG. 2 is an isometric view illustrating a semiconductor fin structurehaving been formed on the semiconductor substrate according to oneembodiment of the present disclosure;

FIG. 3 is an isometric view illustrating a replacement gate structurehaving been formed on the semiconductor fin structure according to oneembodiment of the present disclosure;

FIG. 4 is a cross-sectional view taken along the lines x-x′ of FIG. 3,illustrating a first epitaxial layer having been formed adjacent to agate spacer surrounding the replacement gate structure according to oneembodiment of the present disclosure;

FIG. 5 is a cross-sectional view illustrating a first dielectric/oxidelayer having been formed between the first epitaxial layer and the gatespacer according to one embodiment of the present disclosure;

FIG. 6 is a cross-sectional view illustrating the replacement gatestructure having been removed according to one embodiment of the presentdisclosure;

FIG. 7 is a cross-sectional view illustrating a metal gate structurehaving been formed on the semiconductor fin structure according to oneembodiment of the present disclosure;

FIG. 8 is a cross-sectional view illustrating a second epitaxial layerhaving been formed on the first epitaxial layer according to oneembodiment of the present disclosure;

FIG. 9 is a cross-sectional view illustrating a second dielectric layerhaving been formed between inner sidewalls of the second epitaxial layeraccording to one embodiment of the present disclosure;

FIG. 10 is a cross-sectional view illustrating the first and secondepitaxial layer having been recessed down to source/and drain regionswithin the semiconductor fin structure according to one embodiment ofthe present disclosure;

FIG. 11 is a cross-sectional view illustrating a third dielectric layerhaving been formed over the structure shown in FIG. 10 according to oneembodiment of the present disclosure;

FIG. 12 is a cross-sectional view illustrating the third dielectriclayer having been recessed forming a contact trench according to oneembodiment of the present disclosure;

FIG. 13 is a cross-sectional view illustrating a metal contact havingbeen formed within the contact trench according to one embodiment of thepresent disclosure;

FIG. 14 is a cross-sectional view of the structure in FIG. 9 after thethird dielectric layer has been formed over the second epitaxial layerand the second dielectric layer according to one embodiment of thepresent disclosure;

FIG. 15 is a cross-sectional view illustrating the third dielectriclayer, the first dielectric layer, and the second dielectric layer ofFIG. 14 having been recessed forming a contact trench according to oneembodiment of the present disclosure;

FIG. 16 is a cross-sectional view illustrating a metal contact havingbeen formed in the contact trench of FIG. 15 according to one embodimentof the present disclosure;

FIG. 17 is an operational flow diagram illustrating one process for oneforming self-aligned contacts of a semiconductor device according to oneembodiment of the present disclosure;

FIG. 18 is an operational flow diagram illustrating another process forone forming self-aligned contacts of a semiconductor device according toone embodiment of the present disclosure; and

FIG. 19 is a flow diagram of a design process used in semiconductordesign, manufacture, and/or test according to one embodiment of thepresent disclosure.

DETAILED DESCRIPTION

FIGS. 1 to 16 illustrate one or more processes for forming asemiconductor device with self-aligned contacts. It should be noted thatalthough the following discussion is directed to a fin-field effecttransistor (finFET), this discussion is also application to planar FETs.It should also be noted that one or more embodiments are not limited tothe process for forming fin and gate structures discussed below. Thisdiscussion is provided for illustration purposes, and any process forfabricating the fin and gate structures of a finFET is applicable toembodiments of the present disclosure.

Embodiments of the present disclosure are advantageous over conventionalself-aligned contact (SAC) fabrication processes and structures. Inparticular, one or more embodiments provide a robust SAC cap formationprocess without involving a gate recess. Gate recessing has been foundto be a very uncontrollable process, and difficult to control thevariation across the wafer. Instead of using a gate recessing process,one or more embodiments start with an epitaxial overfill to create amode for the cap dielectric to deposit. This prevents the gate stackfrom being modified, which may cause transistor electrical parametricsuch as threshold voltage drift.

FIG. 1 illustrates a cross-sectional view of a semiconductor structure100 during a process of manufacturing thereof according to oneembodiment of the present disclosure. The semiconductor structure 100may be a part of a large semiconductor chip, for example, and isillustrated to include, among others, one or more three dimensional (3D)or fin-type field-effect-transistors (FETs) that are commonly known toinclude, for example, finFETs and tri-gate FETs. For the purpose ofdiscussion hereinafter without losing generality, it is assumed anddemonstratively illustrated that semiconductor structure 100 includesone or more finFETs (or finFET transistors), although the followingdiscussion may be equally applied to tri-gate FETs with little or nomodification.

In one embodiment, the semiconductor structure 100 comprises substrate102 such as a silicon-on-insulator (SOI) substrate; a dielectric layer104 (e.g., a BOX layer or oxide layer) overlying the substrate 102; anda semiconductor layer (SOI) layer 106 overlying the dielectric layer104. The substrate layer 102 and the semiconductor layer 106 comprise atleast one of Si, Ge alloys, SiGe, GaAs, InAs, InP, SiCGe, SiC, and otherIII/V or II/VI compound semiconductors. The substrate layer 102 and thesemiconductor layer 106 can be made of the same or different materials.The dielectric layer 104, in one embodiment, is a crystalline ornon-crystalline oxide, nitride, oxynitride, or any other insulatingmaterial. The semiconductor layer 106 can be formed utilizing a layertransfer process including a bonding step, or an implantation processsuch as SIMOX (Separation by IMplantation of OXygen).

The semiconductor layer 106 can be undoped or doped with either p-typeor n-type dopants through ion implantation, plasma doping, or gas phasedoping. P-type transistors are produced by doping the semiconductorlayer 106 with elements from group III of the periodic table (e.g.,boron, aluminum, gallium, or indium). As an example, the dopant can beboron in a concentration ranging from 1×10E18 atoms/cm3 to 2×10E21atoms/cm3. N-type transistors are produced by doping the semiconductorlayer 106 with elements from group V of the periodic table (e.g.,phosphorus, antimony, or arsenic).

The semiconductor layer 106 is formed into a one or more fin structures208, as shown in FIG. 2. The fins 208 are formed, in one embodiment, byforming an etch-stop capping layer onto the semiconductor layer 106through, for example, deposition. The etch-stop capping layer, in oneembodiment, may be made of silicon-nitride although other materialsuitable in providing etch-stop function may be used as well. One ormore fin structures 208 are subsequently formed or etched out of thesemiconductor layer 106 to be on top of oxide layer 104 through aprocess involving masking, using industry-standard lithographictechniques, and directionally etching the etch-stop capping layer andunderneath semiconductor layer 106.

The directional etching process, for example a reactive-ion-etching(RIE) process, stops on the dielectric layer 104. After the RIE etchingprocess, the photo-resist mask used in the lithographic etching processmay be removed, leaving patterns of fin structures 208 and caps (notshown), which is made of the etch-stop capping layer and is self-alignedto the find structures 208, on top of the semiconductor layer 106.

FIG. 3 shows that a replacement (dummy) gate 310 is formed on the finstructure(s) 208. The replacement gate 310 is formed, in one embodiment,using oxide, polysilicon, amorphous silicon, nitride, or a combinationthereof. This replacement gate 310 acts as a placeholder for asubsequently formed gate stack. In this embodiment, an optional hardmask 312 is formed on top of the replacement gate 310. The hard mask 312comprises a dielectric material such as a nitride, oxide, oxynitridematerial, and/or any other suitable dielectric layer. The dielectrichard mask 312 can be a single layer of dielectric material or multiplelayers of dielectric materials, and can be formed by a depositionprocess such as chemical vapor deposition (CVD) and/or atomic layerdeposition (ALD). Alternatively, the hard mask 312 can be grown, such asthrough thermal oxidation or thermal nitridation.

In the illustrated embodiment, a gate (dielectric) spacer 314 is formedby depositing a conformal layer of dielectric material (such as anoxide, nitride, or oxynitride) and then performing an anisotropic etch(such as a reactive ion etch). After the gate spacer 314 has beenformed, diffusion/annealing is performed to drive dopants from thesemiconductor layer 106 into the fin structure 208 to form source/drainregions 316, 318. In an embodiment in which the semiconductor layer 106is undoped, source/drain and extension implantation is performed usingthe gate spacer 314 to align the implantation for forming thesource/drain regions 316, 318. In this embodiment, photolithography isused to selectively define NFET and PFET areas for deep source/drain andextension implants, and then ions are implanted. N-type species areimplanted for NFETs, while p-type species are implanted for PFETs. Athermal anneal is then performed to activate and diffuse the ions, suchas through a spike rapid-thermal anneal (RTA). It should be noted that,in other embodiments, the source/drain regions are raised source/drainsformed using an epitaxial growth process.

A first epitaxial layer 420, 422 is formed on exposed surfaces of thesource and drain regions 316, 318, as shown in FIG. 4. In theillustrated example, each portion of the first epitaxial layer 420, 422is located on a respective side of the gate spacer 314. In thisembodiment, the first epitaxial layer 420, 422 is formed through ahigh-temperature epitaxial growth process. For example, thehigh-temperature epitaxial growth process starts with a wet pre-clean,which includes diluted hydro-fluoric acid to remove native oxide and apre-bake at 700-750 degrees Celsius. The epitaxial process is performedat a high vacuum with Disilane and Germane gases, which were injected ataround 600 degrees Celsius, with epitxial growth being sequentiallyperformed within the temperature range of approximately 500 to 670degrees Celsius. It should be noted that other temperature ranges areapplicable as well.

By controlling the chemical reactants and the system parameters of thehigh-temperature epitaxial growth process, the deposited atoms arrive atthe surface of the semiconductor layer 106 with sufficient energy tomove around on the surface and orient themselves to the crystalarrangement of the atoms of the deposition surface. Thus, an epitaxialfilm deposited on a [100] crystal surface will take on a [100]orientation. If, on the other hand, the wafer has an amorphous surfacelayer, the deposited atoms have no surface to align to and formpolysilicon instead of single crystal silicon. Silicon sources for theepitaxial growth include silicon tetrachloride, dichlorosilane(SiH2C12), and silane (SiH4). The temperature for this epitaxial silicondeposition is from approximately 500 to 670 degrees Celsius.

Further, in the illustrated embodiment, the high-temperature epitaxialgrowth process is formed through selective-epitaxial growth of SiGe atopthe source/drain regions 420, 422 in the semiconductor layer 106. The Gecontent of the epitaxial grown SiGe ranges from 5% to 60% (by atomicweight). In another embodiment, the Ge content of the epitaxially grownSiGe ranges from 10% to 40%. In one embodiment, the epitaxial growthlayers 420, 422 comprise a height that is at least equal to the heightof the replacement gate stack structure 312 and/or the gate spacer 314.

In some embodiment, after the first epitaxial layer 420, 422 is formed,a cavity 424, 426 exists between an inner sidewall 428, 430 of the firstepitaxial layer 420, 422 and an outer wall 432, 434 of the gate spacer314. A dielectric layer 536 is formed within the cavities 424, 426. Inthis embodiment, the dielectric layer 536 is a dielectric material suchas silicon oxide, silicon nitride, silicon oxynitride, or a combinationthereof that is formed through chemical vapor deposition (CVD). Excessdielectric material is then removed such as through CMP such thedielectric material 536 only remains within the cavities. In thisembodiment, the top surface of the first epitaxial layer 420, 422, thetop surface of the dielectric layer 536, the top surface of thereplacement gate stack structure 312, and the top surface of the gatespacer 314 are co-planar.

As shown in FIG. 6, the replacement gate stack structure 312 isselectively removed with respect to the gate spacer 316 and finstructure 208 (e.g., via selective etching). This forms a gate cavity638 exposing at least portion of the inner sidewalls 640, 642 of thegate spacer 314, sidewalls 644 of the fin structure 208, and a topsurface 646 of the fin structure 208. A high-k dielectric layer is thenblanket deposited (for example, by CVD, PECVD, or ALD) and selectivelyetched using a process such as RIE to form a high-k dielectric spacer748 on the portions of the gate spacer 314, fin and structure 208exposed by the gate cavity 638, as shown in FIG. 7.

For example, the high-k dielectric spacer 748 is formed on the exposedinner sidewalls 640, 642 of the gate spacer 314, the sidewalls 644 ofthe fin structure 208, and the top surface 646 of the fin structure 208.The high-k dielectric spacer 748 comprises a first vertical portion 750,a second vertical portion 752, and a horizontal portion 754 in contactwith both the first and second vertical portions 750, 752 and a topsurface of the dielectric layer 104. Examples of high-k materialsinclude but are not limited to metal oxides such as hafnium oxide,hafnium silicon oxide, hafnium silicon oxynitride, lanthanum oxide,lanthanum aluminum oxide, zirconium oxide, zirconium silicon oxide,zirconium silicon oxynitride, tantalum oxide, titanium oxide, bariumstrontium titanium oxide, barium titanium oxide, strontium titaniumoxide, yttrium oxide, aluminum oxide, lead scandium tantalum oxide, andlead zinc niobate. The high-k materials may further include dopants suchas lanthanum, aluminum.

After the high-k dielectric spacer 748 has been formed, a gate conductormaterial is then deposited over the structure, lithographicallypatterned, and etched to form a gate conductor 756 between the verticalsidewalls of the 750, 752 of the high-k dielectric spacer 748. The gateconductor material comprises a conductive material, which can be a dopedsemiconductor material, a metallic material, or a combination thereof.The doped semiconductor material can be doped polysilicon, dopedpolycrystalline germanium, a doped silicon-germanium alloy, any otherdoped elemental, a compound semiconductor material, or a combinationthereof. The metallic material can be any metallic material that can bedeposited by chemical vapor deposition (CVD), physical vapor deposition(PVD), or a combination thereof, such as aluminum, tungsten, ruthenium,or a conductive refractory metal nitride, such as TaN (tantalumnitride), TiN (titanium nitride), WN (tungsten nitride), TiAl (titaniumaluminum), TiAlN (titanium aluminum nitride), TaCN (triazacyclononane),or an alloy thereof. In the illustrated embodiment, the gate conductormaterial can be aluminum, tungsten, ruthenium, or any conductive metalor metal alloy (such as aluminum-cobalt). The conductive material mayfurther comprise dopants that are incorporated during or afterdeposition. The conductive material may comprises multiple layers suchas gate work function setting layer and gate conductive layer.

Excess portions of the high-k gate dielectric layer 748 and gateconductor material 756 are removed by planarization, which can beperformed by chemical mechanical planarization (CMP), recess etch, or acombination thereof. The remaining portion of the high-k gate dielectriclayer 748 constitutes a U-shaped gate dielectric and the remainingportion of the gate conductive material layer 756 constitutes a gateconductor. The top surface of the U-shaped gate dielectric 748 and thetop surface of the gate conductor 756 are coplanar with the top surfaceof the first epitaxial layer 420, 422 the top surface of thedielectric/oxide layer 536, and the top surface of the gate spacer 314,as shown in FIG. 7. The U-shaped gate dielectric 748 and the gateconductor 756 collectively constitute the gate stack of the transistor,where the gate spacer 314 laterally surrounds the gate stack.

After the metal gate has been formed, a second epitaxial layer 858, 860is formed on the first epitaxial layer 420, 422 using a low-temperatureepitaxial growth process, as shown in FIG. 8. For example, thelow-temperature epitaxial growth process starts with hydrogen flowing asa plasma gas. Then, silane is introduced with the dilution ratio ofH2/SiH4 of 2:1 to 3:1. The deposition pressures are in the mT regime,and the temperatures are between 300 and 400 degrees Celsius. However,other pressures and temperatures are applicable as well. In thisembodiment, a bottom surface 862, 864 of the second epitaxial layer 858,860 contacts a top surface 866, 868 of the first epitaxial layer 420 422such that at least a portion of the second epitaxial layer 858, 860 isformed above the gate spacer 314 and/or gate stack 748, 754. In oneembodiment, a width of the second epitaxial layer 858, 860 correspondsto a width of the underlying first epitaxial layer 420, 422. In thisembodiment, a cavity 870 is formed between inner sidewalls 872, 874 ofthe second epitaxial layer 858, 860 exposing the top surface of thedielectric layer 536, the top surface of the gate spacer 314, the topsurface of the U-shaped gate dielectric 748, and the top surface of thegate conductor 754.

After the second epitaxial layer 858, 860 has been formed, a seconddielectric layer 976 is then formed within the cavity 870 between theinner sidewalls 872, 874 of the second epitaxial layer 858, 860, asshown in FIG. 9. Vertical sidewalls of the second dielectric layer 976contact the inner sidewalls 872, 874 of the second epitaxial layer 860,862. A bottom surface of the second dielectric layer 976 contacts a topsurface of the dielectric layer 536, the top surface of the gate spacer314, the top surface of the U-shaped gate dielectric 748, and the topsurface of the gate conductor 754. In this embodiment, the top surfaceof the second dielectric layer 976 is co-planar with the top surface ofthe second epitaxial layer 858, 860. The second dielectric layer 976, inone embodiment, comprises an oxide material, nitride material, low-kmaterial or any suitable combination of those materials

FIG. 10 shows that once the second dielectric layer 976 has been formed,the first epitaxial layer 420, 422 and the second epitaxial layer 858,860 are recessed/etched exposing at least a portion of the source anddrain regions 316, 318 in the fin structure 208. Therefore, the firstand second epitaxial layers 420, 422, 858, 860 are sacrificial in thisembodiment. In one embodiment, the recessing/etching is performed usinga wet etch process that is selective to the material of the SAC cap 976and spacer 314. This recessing process exposes the vertical sidewalls ofthe first dielectric layer 536 formed on the walls of the gate spacer314, and also exposes vertical sidewalls of the second dielectric layer976. In an embodiment, where the first epitaxial layers 420, 422contacts the gate spacer 314 and the dielectric/oxide layer 536 is notformed, the recessing of the first and second epitaxial layers 420, 422,858, 860 exposes the outer sidewall of the gate spacer 314.

A third dielectric layer 1178 is then formed over the entire structureas shown in FIG. 11. In this embodiment, the third dielectric layer 1178is formed on the exposed portions of the source and drain regions 316,318, the vertical sidewalls of the first dielectric layer 536, thevertical sidewalls of the second dielectric layer 976, and a top surfaceof the second dielectric layer 976. In one embodiment, the thirddielectric layer 1178 extends above the second dielectric layer 976. Thethird dielectric layer 1178, in one embodiment, is a dielectric materialsuch as silicon oxide, silicon nitride, silicon oxynitride, or acombination thereof that is formed through chemical vapor deposition(CVD).

Next, portions of the third dielectric layer 1178 over at least one ofthe source and drain regions 316, 318 are removed (e.g., through a dryetch such as RIE and/or a wet etch using HF) so as to create at leastone contact trench/opening 1280, as shown in FIG. 12. The contacttrench(es) 1280 exposes a top surface of the source and/or drain regions316, 318 formed within the fin structure 208; at least one verticalsidewall of the first dielectric layer 536; at least one verticalsidewall of the second dielectric layer 976; at least a portion of thetop surface of the second dielectric layer 978; and vertical sidewallsof the third dielectrics layer 1178, where at least one of the verticalsidewalls is above and in contract with the top surface of the exposedportion of the second dielectric layer 976.

An optional silicide region 1282 is formed within the contact trench(s)1280 on at least a portion of the source and/or drain regions 316, 318,as shown in FIG. 12. In this embodiment, a metal is deposited on top ofthe source and/or drain regions 316, 318. An anneal is then performed toform silicide, and then the metal is selectively removed. The metal cancomprise, for example, nickel, cobalt, titanium, platinum, or an alloyor combination thereof. After the silicide region(s) 1280 has beenformed a contact(s), one or more self-aligned contacts 1384 is formed inthe contact trench(es) 1280, as shown in FIG. 13. For example, thecontact trench 1280 is filled with contact materials such as tungsten orcopper, and polished to remove any excess above third dielectric layer1178. The contact(s) 1384, in one embodiment, contacts the sidewalls ofthe contact trench 1280, which is comprised of a vertical sidewall(s) ofthe third dielectric layer 1178; the at least one vertical sidewall ofthe first dielectric layer 536; and the at least one vertical sidewallof the second dielectric layer 976. Also, the contact(s) 1384 extendsover and contacts the portion(s) of the top surface of the seconddielectric layer 976. The contact(s) 1280 further contacts the at leastone vertical sidewall of the third dielectric layer 1178.

It should be noted that in some embodiments, the first epitaxial layers420, 422 and the second epitaxial layers 858, 860 are notremoved/recessed after the first dielectric layer 536 is formed. In thisembodiment, the third dielectric layer 1178 is formed on top of and incontact with the second epitaxial layers 858, 860 and the seconddielectric layer 976, as shown in FIG. 14. A first etching/recessingprocess etches at least a first portion of the third dielectric layer1178 to expose at least a portion of the second dielectric layer 976 andat least a portion second epitaxial layer 858, 860. A secondetching/recessing process etches the exposed portion of the secondepitaxial layer 858, 860 and at least a portion of the first epitaxiallayer 420, 422 under the exposed portion of the second epitaxial layer858, 860, as shown in FIG. 15. These etching/recessing processes createsat least one contact trench 1580 that exposes at least a portion of thesource and/or drain regions 316; at least one vertical sidewall of thefirst dielectric layer 536; at least one vertical sidewall of the seconddielectric layer 976; at least a portion of the top surface of thesecond dielectric layer 978; at least one vertical sidewall of the thirddielectric layer 1178; and vertical sidewalls of the third dielectricslayer, where at least one of the vertical sidewalls is above and incontract with the top surface of the exposed portion of the seconddielectric layer 976.

FIG. 16 shows that an optional silicide region 1682 is formed within thecontact trench 1580 on at least a portion of the exposed source and/ordrain regions 316, 318, as discussed above with respect to FIG. 12. FIG.16 shows that a contact(s) 1684 is then formed in the contact trench1580, as discussed above with respect to FIG. 12. In this embodiment,the contact(s) 1684, is formed on the sidewalls of the contact trench1580 comprised of the at least one vertical sidewall of the firstdielectric layer 536; the at least one vertical sidewall of the seconddielectric layer 976; the vertical sidewall(s) of the first epitaxiallayer 420, 422; and the vertical sidewall(s) of the second epitaxiallayer 858, 860. Also, the contact(s) 1684 extends over and contacts theportion(s) of the top surface of the second dielectric layer 976, andfurther contacts the vertical sidewalls of the third dielectric layer976.

FIG. 17 is an operational flow diagram illustrating one process forforming self-aligned contacts of a semiconductor device. In FIG. 17, theoperational flow diagram begins at step 1702 and flows directly to step1704. A metal gate structure 748, 756, at step 1704, is formed on aportion of a semiconductor layer 106/208 of a substrate 102. The metalgate structure 748, 756 contacts inner sidewalls of a gate spacer 314. Asecond sacrificial epitaxial layer 858, 860, at step 1706, is formed afirst sacrificial epitaxial layer 420, 422. The first sacrificialepitaxial layer 420, 422 is adjacent to the gate spacer 314 and isformed on source/drain regions 316, 318 of the semiconductor layer106/208. The first and second sacrificial epitaxial layers 420, 422,858, 860, at step 1708, are recessed. The recessing exposes at least aportion of the source/drain regions 316, 318. A dielectric layer 1178,at step 1710, is formed on the exposed portions of the source/drainregions 316, 318, and over the gate spacer 314 and metal gate structure748, 756. At least one trench/cavity 1280, at step 1712, is formedwithin the dielectric layer 1178 exposing at least a portion of one ormore of the source/drain regions 316, 318. At least one metal contact1284, at step 1714, is formed within the at least one cavity 1280. Thecontrol flow exits at step 1716.

FIG. 18 is an operational flow diagram illustrating another process forforming self-aligned contacts of a semiconductor device. In FIG. 18, theoperational flow diagram begins at step 1802 and flows directly to step1804. A metal gate structure 748, 756, at step 1804 is formed on aportion of the semiconductor layer 106/208 of a substrate 102 andcontacts inner sidewalls of a gate spacer 314. A second epitaxial layer858, 860, at step 1806, is formed a first epitaxial layer 420, 422. Thefirst epitaxial layer 420, 422 is adjacent to the gate spacer 314 and isformed on source/drain regions 316, 318 of the semiconductor layer106/208. A dielectric layer 1178, at step 1808, is formed on a topsurface of the second epitaxial layer 858, 860. At least a portion ofthe dielectric layer 1178, the second epitaxial layer 858, 860, and thefirst epitaxial layer 420, 422, at step 1810 is recessed. The recessingforming at one least trench/cavity 1580 exposing at least a portion ofat least one of the source/drain regions 316, 318. At least one metalcontact 1684, at step 1812, is formed within the at least one cavity1580.

FIG. 19 shows a block diagram of an exemplary design flow 1900 used forexample, in semiconductor IC logic design, simulation, test, layout, andmanufacture. Design flow 1900 includes processes, machines, and/ormechanisms for processing design structures or devices to generatelogically or otherwise functionally equivalent representations of thedesign structures and/or devices described above and shown in FIGS.1-16. The design structures processed and/or generated by design flow1900 may be encoded on machine-readable transmission or storage media toinclude data and/or instructions that when executed or otherwiseprocessed on a data processing system generate a logically,structurally, mechanically, or otherwise functionally equivalentrepresentation of hardware components, circuits, devices, or systems.Machines include, but are not limited to, any machine used in an ICdesign process, such as designing, manufacturing, or simulating acircuit, component, device, or system. For example, machines mayinclude: lithography machines, machines and/or equipment for generatingmasks (e.g. e-beam writers), computers or equipment for simulatingdesign structures, any apparatus used in the manufacturing or testprocess, or any machines for programming functionally equivalentrepresentations of the design structures into any medium (e.g. a machinefor programming a programmable gate array).

Design flow 1900 may vary depending on the type of representation beingdesigned. For example, a design flow 1900 for building an applicationspecific IC (ASIC) may differ from a design flow 1900 for designing astandard component or from a design flow 1900 for instantiating thedesign into a programmable array, for example a programmable gate array(PGA) or a field programmable gate array (FPGA) offered by Altera® Inc.or Xilinx® Inc.

FIG. 19 illustrates multiple such design structures including an inputdesign structure 1920 that is preferably processed by a design process1910. Design structure 1920 may be a logical simulation design structuregenerated and processed by design process 1910 to produce a logicallyequivalent functional representation of a hardware device. Designstructure 1920 may also or alternatively comprise data and/or programinstructions that when processed by design process 1910, generate afunctional representation of the physical structure of a hardwaredevice. Whether representing functional and/or structural designfeatures, design structure 1920 may be generated using electroniccomputer-aided design (ECAD) such as implemented by a coredeveloper/designer. When encoded on a machine-readable datatransmission, gate array, or storage medium, design structure 1920 maybe accessed and processed by one or more hardware and/or softwaremodules within design process 1910 to simulate or otherwise functionallyrepresent an electronic component, circuit, electronic or logic module,apparatus, device, or system such as those shown in FIGS. 1-16. As such,design structure 1920 may comprise files or other data structuresincluding human and/or machine-readable source code, compiledstructures, and computer-executable code structures that when processedby a design or simulation data processing system, functionally simulateor otherwise represent circuits or other levels of hardware logicdesign. Such data structures may include hardware-description language(HDL) design entities or other data structures conforming to and/orcompatible with lower-level HDL design languages such as Verilog andVHDL, and/or higher level design languages such as C or C++.

Design process 1910 preferably employs and incorporates hardware and/orsoftware modules for synthesizing, translating, or otherwise processinga design/simulation functional equivalent of the components, circuits,devices, or logic structures shown in FIGS. 1-16 to generate a Netlist1980 which may contain design structures such as design structure 1920.Netlist 1980 may comprise, for example, compiled or otherwise processeddata structures representing a list of wires, discrete components, logicgates, control circuits, I/O devices, models, etc. that describes theconnections to other elements and circuits in an integrated circuitdesign. Netlist 1980 may be synthesized using an iterative process inwhich netlist 1980 is resynthesized one or more times depending ondesign specifications and parameters for the device. As with otherdesign structure types described herein, netlist 1980 may be recorded ona machine-readable data storage medium or programmed into a programmablegate array. The medium may be a non-volatile storage medium such as amagnetic or optical disk drive, a programmable gate array, a compactflash, or other flash memory. Additionally, or in the alternative, themedium may be a system or cache memory, buffer space, or electrically oroptically conductive devices and materials on which data packets may betransmitted and intermediately stored via the Internet, or othernetworking suitable means.

Design process 1910 may include hardware and software modules forprocessing a variety of input data structure types including Netlist1980. Such data structure types may reside, for example, within libraryelements 1930 and include a set of commonly used elements, circuits, anddevices, including models, layouts, and symbolic representations, for agiven manufacturing technology (e.g., different technology nodes, 32 nm,45 nm, 90 nm, etc.). The data structure types may further include designspecifications 1940, characterization data 1950, verification data 1960,design rules 1970, and test data files 1985 which may include input testpatterns, output test results, and other testing information. Designprocess 1910 may further include, for example, standard mechanicaldesign processes such as stress analysis, thermal analysis, mechanicalevent simulation, process simulation for operations such as casting,molding, and die press forming, etc. One of ordinary skill in the art ofmechanical design can appreciate the extent of possible mechanicaldesign tools and applications used in design process 1910 withoutdeviating from the scope and spirit of the invention. Design process1910 may also include modules for performing standard circuit designprocesses such as timing analysis, verification, design rule checking,place and route operations, etc.

Design process 1910 employs and incorporates logic and physical designtools such as HDL compilers and simulation model build tools to processdesign structure 1920 together with some or all of the depictedsupporting data structures along with any additional mechanical designor data (if applicable), to generate a second design structure 1990.Design structure 1990 resides on a storage medium or programmable gatearray in a data format used for the exchange of data of mechanicaldevices and structures (e.g. information stored in a IGES, DXF,Parasolid XT, JT, DRG, or any other suitable format for storing orrendering such mechanical design structures). Similar to designstructure 1920, design structure 1990 preferably comprises one or morefiles, data structures, or other computer-encoded data or instructionsthat reside on transmission or data storage media and that whenprocessed by an ECAD system generate a logically or otherwisefunctionally equivalent form of one or more of the embodiments of theinvention shown in FIGS. 1-16. In one embodiment, design structure 1990may comprise a compiled, executable HDL simulation model thatfunctionally simulates the devices shown in FIGS. 1-16.

Design structure 1990 may also employ a data format used for theexchange of layout data of integrated circuits and/or symbolic dataformat (e.g. information stored in a GDSII (GDS2), GL1, OASIS, mapfiles, or any other suitable format for storing such design datastructures). Design structure 1990 may comprise information such as, forexample, symbolic data, map files, test data files, design contentfiles, manufacturing data, layout parameters, wires, levels of metal,vias, shapes, data for routing through the manufacturing line, and anyother data required by a manufacturer or other designer/developer toproduce a device or structure as described above and shown in FIGS.1-16. Design structure 1990 may then proceed to a stage 1995 where, forexample, design structure 1990: proceeds to tape-out, is released tomanufacturing, is released to a mask house, is sent to another designhouse, is sent back to the customer, etc.

The method as described above is used in the fabrication of integratedcircuit chips.

The resulting integrated circuit chips can be distributed by thefabricator in raw wafer form (that is, as a single wafer that hasmultiple unpackaged chips), as a bare die, or in a packaged form. In thelatter case the chip is mounted in a single chip package (such as aplastic carrier, with leads that are affixed to a motherboard or otherhigher level carrier) or in a multichip package (such as a ceramiccarrier that has either or both surface interconnections or buriedinterconnections). In any case the chip is then integrated with otherchips, discrete circuit elements, and/or other signal processing devicesas part of either (a) an intermediate product, such as a motherboard, or(b) an end product. The end product can be any product that includesintegrated circuit chips, ranging from toys and other low-endapplications to advanced computer products having a display, a keyboardor other input device, and a central processor.

The present invention may be a system, a method, and/or a computerprogram product. The computer program product may include a computerreadable storage medium (or media) having computer readable programinstructions thereon for causing a processor to carry out aspects of thepresent invention.

The computer readable storage medium can be a tangible device that canretain and store instructions for use by an instruction executiondevice. The computer readable storage medium may be, for example, but isnot limited to, an electronic storage device, a magnetic storage device,an optical storage device, an electromagnetic storage device, asemiconductor storage device, or any suitable combination of theforegoing. A non-exhaustive list of more specific examples of thecomputer readable storage medium includes the following: a portablecomputer diskette, a hard disk, a random access memory (RAM), aread-only memory (ROM), an erasable programmable read-only memory (EPROMor Flash memory), a static random access memory (SRAM), a portablecompact disc read-only memory (CD-ROM), a digital versatile disk (DVD),a memory stick, a floppy disk, a mechanically encoded device such aspunch-cards or raised structures in a groove having instructionsrecorded thereon, and any suitable combination of the foregoing. Acomputer readable storage medium, as used herein, is not to be construedas being transitory signals per se, such as radio waves or other freelypropagating electromagnetic waves, electromagnetic waves propagatingthrough a waveguide or other transmission media (e.g., light pulsespassing through a fiber-optic cable), or electrical signals transmittedthrough a wire.

Computer readable program instructions described herein can bedownloaded to respective computing/processing devices from a computerreadable storage medium or to an external computer or external storagedevice via a network, for example, the Internet, a local area network, awide area network and/or a wireless network. The network may comprisecopper transmission cables, optical transmission fibers, wirelesstransmission, routers, firewalls, switches, gateway computers and/oredge servers. A network adapter card or network interface in eachcomputing/processing device receives computer readable programinstructions from the network and forwards the computer readable programinstructions for storage in a computer readable storage medium withinthe respective computing/processing device.

Computer readable program instructions for carrying out operations ofthe present invention may be assembler instructions,instruction-set-architecture (ISA) instructions, machine instructions,machine dependent instructions, microcode, firmware instructions,state-setting data, or either source code or object code written in anycombination of one or more programming languages, including an objectoriented programming language such as Java, Smalltalk, C++ or the like,and conventional procedural programming languages, such as the “C”programming language or similar programming languages. The computerreadable program instructions may execute entirely on the user'scomputer, partly on the user's computer, as a stand-alone softwarepackage, partly on the user's computer and partly on a remote computeror entirely on the remote computer or server. In the latter scenario,the remote computer may be connected to the user's computer through anytype of network, including a local area network (LAN) or a wide areanetwork (WAN), or the connection may be made to an external computer(for example, through the Internet using an Internet Service Provider).In some embodiments, electronic circuitry including, for example,programmable logic circuitry, field-programmable gate arrays (FPGA), orprogrammable logic arrays (PLA) may execute the computer readableprogram instructions by utilizing state information of the computerreadable program instructions to personalize the electronic circuitry,in order to perform aspects of the present invention.

Aspects of the present invention are described herein with reference toflowchart illustrations and/or block diagrams of methods, apparatus(systems), and computer program products according to embodiments of theinvention. It will be understood that each block of the flowchartillustrations and/or block diagrams, and combinations of blocks in theflowchart illustrations and/or block diagrams, can be implemented bycomputer readable program instructions.

These computer readable program instructions may be provided to aprocessor of a general purpose computer, special purpose computer, orother programmable data processing apparatus to produce a machine, suchthat the instructions, which execute via the processor of the computeror other programmable data processing apparatus, create means forimplementing the functions/acts specified in the flowchart and/or blockdiagram block or blocks. These computer readable program instructionsmay also be stored in a computer readable storage medium that can directa computer, a programmable data processing apparatus, and/or otherdevices to function in a particular manner, such that the computerreadable storage medium having instructions stored therein comprises anarticle of manufacture including instructions which implement aspects ofthe function/act specified in the flowchart and/or block diagram blockor blocks.

The computer readable program instructions may also be loaded onto acomputer, other programmable data processing apparatus, or other deviceto cause a series of operational steps to be performed on the computer,other programmable apparatus or other device to produce a computerimplemented process, such that the instructions which execute on thecomputer, other programmable apparatus, or other device implement thefunctions/acts specified in the flowchart and/or block diagram block orblocks.

The flowchart and block diagrams in the Figures illustrate thearchitecture, functionality, and operation of possible implementationsof systems, methods, and computer program products according to variousembodiments of the present invention. In this regard, each block in theflowchart or block diagrams may represent a module, segment, or portionof instructions, which comprises one or more executable instructions forimplementing the specified logical function(s). In some alternativeimplementations, the functions noted in the block may occur out of theorder noted in the figures. For example, two blocks shown in successionmay, in fact, be executed substantially concurrently, or the blocks maysometimes be executed in the reverse order, depending upon thefunctionality involved. It will also be noted that each block of theblock diagrams and/or flowchart illustration, and combinations of blocksin the block diagrams and/or flowchart illustration, can be implementedby special purpose hardware-based systems that perform the specifiedfunctions or acts or carry out combinations of special purpose hardwareand computer instructions.

The terminology used herein is for the purpose of describing particularembodiments only and is not intended to be limiting of the invention. Asused herein, the singular forms “a”, “an” and “the” are intended toinclude the plural forms as well, unless the context clearly indicatesotherwise. It will be further understood that the terms “comprises”and/or “comprising,” when used in this specification, specify thepresence of stated features, integers, steps, operations, elements,and/or components, but do not preclude the presence or addition of oneor more other features, integers, steps, operations, elements,components, and/or groups thereof.

The description of the present disclosure has been presented forpurposes of illustration and description, but is not intended to beexhaustive or limited to the invention in the form disclosed. Manymodifications and variations will be apparent to those of ordinary skillin the art without departing from the scope and spirit of the invention.The embodiment was chosen and described in order to best explain theprinciples of the invention and the practical application, and to enableothers of ordinary skill in the art to understand the invention forvarious embodiments with various modifications as are suited to theparticular use contemplated.

What is claimed is:
 1. A method of forming self-aligned contacts for asemiconductor device, the method comprising: forming a metal gatestructure on a portion of a semiconductor layer of a substrate andcontacting inner sidewalls of a gate spacer; forming a secondsacrificial epitaxial layer on a first sacrificial epitaxial layer,wherein the first sacrificial epitaxial layer is adjacent to the gatespacer and is formed on source/drain regions of the semiconductor layer;recessing the first and second sacrificial epitaxial layers, therecessing exposing at least a portion of the source/drain regions;forming a first dielectric layer on the exposed portions of thesource/drain regions, and over the gate spacer and metal gate structure;forming at least one cavity within the first dielectric layer above atleast a portion of one or more of the source/drain regions; and formingat least one metal contact within the at least one cavity.
 2. The methodof claim 1, wherein prior to forming the metal gate structure the methodcomprises: forming a replacement gate structure on the portion of thesemiconductor layer; forming the gate spacer on the replacement gatestructure; forming the first sacrificial epitaxial layer on thesource/drain regions, wherein forming the first sacrificial epitaxiallayer creates a cavity between the first sacrificial epitaxial layer andan outer sidewall of the gate spacer; and forming a second dielectriclayer within the cavity between the first sacrificial epitaxial layerand the outer sidewall of the gate spacer.
 3. The method of claim 2,wherein forming the metal gate structure comprises: removing thereplacement gate structure, the removing exposing the portion of thesemiconductor layer; and forming a dielectric spacer on the exposedportion of the semiconductor layer; and forming a gate conductor withinthe cavity in contact with the dielectric spacer.
 4. The method of claim1, wherein the portion of the semiconductor layer comprises a finstructure.
 5. The method of claim 1, further comprising: forming thefirst sacrificial epitaxial layer at a first temperature; and formingthe second sacrificial epitaxial layer at a second temperature, whereinthe first temperature is higher than the second temperature.
 6. Themethod of claim 1, further comprising: forming a third dielectric layerbetween and in contact with a first inner sidewall of the secondsacrificial epitaxial layer and a second inner sidewall of the secondsacrificial epitaxial layer, wherein the third dielectric layer isfurther formed above and in contact with the metal gate structure. 7.The method of claim 6, wherein the at least one cavity exposes at leasta portion of the third dielectric layer, and wherein the at least onemetal contact is further formed on the portion of the third dielectriclayer.
 8. A method of forming self-aligned contacts for a semiconductordevice, the method comprising: forming a metal gate structure on aportion of the semiconductor layer of a substrate and contacting innersidewalls of a gate spacer; forming a second epitaxial layer on a firstsacrificial epitaxial layer, wherein the first epitaxial layer isadjacent to the gate spacer and is formed on source/drain regions of thesemiconductor layer; forming a first dielectric layer on a top surfaceof the second epitaxial layer; recessing at least a portion of the firstdielectric layer, the second epitaxial layer, and the first epitaxiallayer, the recessing forming at one least cavity exposing at least aportion of at least one of the source/drain regions; and forming atleast one metal contact within the at least one cavity.
 9. The method ofclaim 8, wherein prior to forming the metal gate structure the methodcomprises: forming a replacement gate structure on the portion of thesemiconductor layer; forming the gate spacer on the replacement gatestructure; forming the first epitaxial layer on the source/drainregions, wherein forming the first epitaxial layer creates a cavitybetween the first epitaxial layer and an outer sidewall of the gatespacer; and forming a second dielectric layer within the cavity betweenthe first epitaxial layer and the outer sidewall of the gate spacer. 10.The method of claim 9, wherein forming the metal gate structurecomprises: removing the replacement gate structure, the removingexposing the portion of the semiconductor layer; and forming adielectric spacer on the exposed portion of the semiconductor layer; andforming a gate conductor within the cavity in contact with thedielectric spacer.
 11. The method of claim 8, wherein the portion of thesemiconductor layer comprises a fin structure.
 12. The method of claim8, further comprising: forming the first epitaxial layer at a firsttemperature; and forming the second epitaxial layer at a secondtemperature, wherein the first temperature is higher than the secondtemperature.
 13. The method of claim 8, further comprising: prior to thefirst dielectric layer being formed, forming a second dielectric layerbetween and in contact with a first inner sidewall of the secondepitaxial layer and a second inner sidewall of the second epitaxiallayer, wherein the third dielectric layer is further formed above and incontact with the metal gate structure.
 14. The method of claim 8,wherein the at least one cavity exposes at least a portion of the seconddielectric layer, and wherein the at least one metal contact is furtherformed on the portion of the second dielectric layer.
 15. Asemiconductor device comprising: a substrate; a semiconductor layerformed on the substrate; a metal gate structure formed on a portion ofthe semiconductor layer; a gate spacer formed on the metal gatestructure; a first epitaxial layer formed on source/drain regions of thesemiconductor layer and adjacent to the gate spacer; a second epitaxiallayer formed on a top surface of the first epitaxial layer, wherein atleast a portion of the second epitaxial layer is formed above of themetal gate structure; and at least one self-aligned metal contact formedon at least one of the source/drain regions; and a dielectric layerformed between and in contact with a first inner sidewall of the secondepitaxial layer and a second inner sidewall of the second epitaxiallayer, wherein the dielectric layer is further formed above and incontact with the metal gate structure.
 16. The semiconductor device ofclaim 15, wherein the at least one metal contact is in contact with atleast a sidewall and a portion of a top surface of the dielectric layer.17. The semiconductor device of claim 15, further comprising: adielectric layer formed between and in contact with an inner sidewall ofthe first epitaxial layer and an outer sidewall of the gate spacer. 18.The semiconductor device of claim 15, further comprising: a dielectriclayer formed on a top surface of the second epitaxial layer.
 19. Thesemiconductor device of claim 18, wherein the at least one metal contactis in contact with at least a sidewall of the dielectric layer.